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Article

Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication

1
P.N. Lebedev Physical Institute of the Russian Academy of Science, 119991 Moscow, Russia
2
Department of Physics, National Research University The Higher School of Economics, 101000 Moscow, Russia
*
Author to whom correspondence should be addressed.
These authors contributed equally to this work.
Academic Editor: MinA Kang
Micromachines 2021, 12(8), 850; https://doi.org/10.3390/mi12080850
Received: 23 June 2021 / Revised: 15 July 2021 / Accepted: 19 July 2021 / Published: 21 July 2021
(This article belongs to the Special Issue Two-Dimensional Materials for Advanced Electronic Devices)
The fast and precise fabrication of micro-devices based on single flakes of novel 2D materials and stacked heterostructures is vital for exploration of novel functionalities. In this paper, we demonstrate a fast high-resolution contact mask lithography through a simple upgrade of metallographic optical microscope. Suggested kit for the micromask lithography is compact and easily compatible with a glove box, thus being suitable for a wide range of air-unstable materials. The shadow masks could be either ordered commercially or fabricated in a laboratory using a beam lithography. The processes of the mask alignment and the resist exposure take a few minutes and provide a micrometer resolution. With the total price of the kit components around USD 200, our approach would be convenient for laboratories with the limited access to commercial lithographic systems. View Full-Text
Keywords: lithography; mask lithography; Van der Waals heterostructures; 2D materials; nanoelectronics lithography; mask lithography; Van der Waals heterostructures; 2D materials; nanoelectronics
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MDPI and ACS Style

Pugachev, M.V.; Duleba, A.I.; Galiullin, A.A.; Kuntsevich, A.Y. Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication. Micromachines 2021, 12, 850. https://doi.org/10.3390/mi12080850

AMA Style

Pugachev MV, Duleba AI, Galiullin AA, Kuntsevich AY. Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication. Micromachines. 2021; 12(8):850. https://doi.org/10.3390/mi12080850

Chicago/Turabian Style

Pugachev, Mikhail V., Aliaksandr I. Duleba, Arslan A. Galiullin, and Aleksandr Y. Kuntsevich. 2021. "Micromask Lithography for Cheap and Fast 2D Materials Microstructures Fabrication" Micromachines 12, no. 8: 850. https://doi.org/10.3390/mi12080850

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