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Journal: MicromachinesVolume: 12Number: 849
Article: Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si
- Authors:
- Maria Censabella1,2,
- Cristina Drago1 and
- Brunella Cafra3
- et al.
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