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Journal: Micromachines, 2021
Volume: 12
Number: 849
849
Article: Morphological and Compositional Studies on Al/Ti/TiN/Si, Al/TiN/Si, Al/W/Si, Al/WN/Si Systems to Test the Diffusion Barrier Properties of Nanoscale-Thick Layers between Al and Si
Authors: by Maria Censabella, Cristina Drago, Brunella Cafra, Paolo Badalà, Anna Bassi, Giovanni Piccitto, Salvatore Mirabella, Maria Grazia Grimaldi and Francesco Ruffino
Link: https://www.mdpi.com/2072-666X/12/8/849

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