Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim
Abstract
:1. Introduction
2. Design and Parameters of SRM-Mirror
2.1. SRM-Mirror
2.2. Design Parameters
3. Microfabrication of SRM-Mirror
4. Mechanical and Optical Characterization of SRM-Mirror
5. Conclusions
Supplementary Materials
Author Contributions
Funding
Data Availability Statement
Conflicts of Interest
References
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Parameters | Values | Remark |
---|---|---|
Geometric | ||
SixNy membrane area | 5 mm (w) × 4.5 mm (l) | |
SixNy membrane thickness | 1 μm | Figure S2a |
SiO2 thickness | 1.5 μm | |
Al mirror thickness | 80 nm | Figure S2b |
Al heater (line pattern) thickness | 1 μm | Figure S2a |
Al heater (line pattern) length | 500 μm | |
Al heater (line pattern) width | 14 μm | |
Al heater (line pattern) pitch | 20 μm | |
SRM length (horizontal/vertical) | 4.9 mm/4.2 mm | |
SRM width | 120 μm | |
Silicon frame (outmost) | 6 mm (w) × 6 mm (l) | |
Mechanical | ||
CTE of Al | 23.1 × 10−6 [K−1] g | |
CTE of SixNy | 2.3 × 10−6 [K−1] g | |
CTE of SiO2 | 0.55 × 10−6 [K−1] g | |
Thermal Conductivity of Al | 237 [W/(K·m)] g | |
Thermal Conductivity of SixNy | 20 [W/(K·m)] g | |
Thermal Conductivity of SiO2 | 1.38 [W/(K·m)] g | |
Residual stress of Al | 200 [MPa] | [26,27] |
Residual stress of SixNy | 100 [MPa] | [28,29] |
Elastic Modulus of Al | 70 [GPa] g | |
Elastic Modulus of SixNy | 200 [GPa] | [28] |
Poisson Ratio of Al | 0.35 [a.u.] g | |
Poisson Ratio of SixNy | 0.23 [a.u.] g |
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Ahn, M.-S.; Jeon, J.; Jang, K.-W.; Jeong, K.-H. Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim. Micromachines 2021, 12, 754. https://doi.org/10.3390/mi12070754
Ahn M-S, Jeon J, Jang K-W, Jeong K-H. Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim. Micromachines. 2021; 12(7):754. https://doi.org/10.3390/mi12070754
Chicago/Turabian StyleAhn, Myeong-Su, Jaehun Jeon, Kyung-Won Jang, and Ki-Hun Jeong. 2021. "Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim" Micromachines 12, no. 7: 754. https://doi.org/10.3390/mi12070754