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Journal: Micromachines, 2021
Volume: 12
Number: 754

Article: Large-Area and Ultrathin MEMS Mirror Using Silicon Micro Rim
Authors: by Myeong-Su Ahn, Jaehun Jeon, Kyung-Won Jang and Ki-Hun Jeong
Link: https://www.mdpi.com/2072-666X/12/7/754

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