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Journal: Micromachines, 2021
Volume: 12
Number: 724
724
Article: The Recent Progress of MEMS/NEMS Resonators
Authors: by Lei Wei, Xuebao Kuai, Yidi Bao, Jiangtao Wei, Liangliang Yang, Peishuai Song, Mingliang Zhang, Fuhua Yang and Xiaodong Wang
Link: https://www.mdpi.com/2072-666X/12/6/724

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