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Journal: Micromachines, 2021
Volume: 12
Number: 419

Article: Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays
Authors: by David Torres, LaVern Starman, Harris Hall, Juan Pastrana and Sarah Dooley
Link: https://www.mdpi.com/2072-666X/12/4/419

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