Zhang, Q.;                     Li, X.;                     Zhao, J.;                     Sun, Z.;                     Lu, Y.;                     Liu, T.;                     Zhang, J.    
        Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE. Micromachines 2021, 12, 1153.
    https://doi.org/10.3390/mi12101153
    AMA Style
    
                                Zhang Q,                                 Li X,                                 Zhao J,                                 Sun Z,                                 Lu Y,                                 Liu T,                                 Zhang J.        
                Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE. Micromachines. 2021; 12(10):1153.
        https://doi.org/10.3390/mi12101153
    
    Chicago/Turabian Style
    
                                Zhang, Qian,                                 Xu Li,                                 Jianyun Zhao,                                 Zhifei Sun,                                 Yong Lu,                                 Ting Liu,                                 and Jicai Zhang.        
                2021. "Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE" Micromachines 12, no. 10: 1153.
        https://doi.org/10.3390/mi12101153
    
    APA Style
    
                                Zhang, Q.,                                 Li, X.,                                 Zhao, J.,                                 Sun, Z.,                                 Lu, Y.,                                 Liu, T.,                                 & Zhang, J.        
        
        (2021). Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE. Micromachines, 12(10), 1153.
        https://doi.org/10.3390/mi12101153