Zhang, Q.; Li, X.; Zhao, J.; Sun, Z.; Lu, Y.; Liu, T.; Zhang, J.
Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE. Micromachines 2021, 12, 1153.
https://doi.org/10.3390/mi12101153
AMA Style
Zhang Q, Li X, Zhao J, Sun Z, Lu Y, Liu T, Zhang J.
Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE. Micromachines. 2021; 12(10):1153.
https://doi.org/10.3390/mi12101153
Chicago/Turabian Style
Zhang, Qian, Xu Li, Jianyun Zhao, Zhifei Sun, Yong Lu, Ting Liu, and Jicai Zhang.
2021. "Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE" Micromachines 12, no. 10: 1153.
https://doi.org/10.3390/mi12101153
APA Style
Zhang, Q., Li, X., Zhao, J., Sun, Z., Lu, Y., Liu, T., & Zhang, J.
(2021). Effect of High-Temperature Nitridation and Buffer Layer on Semi-Polar (10–13) AlN Grown on Sapphire by HVPE. Micromachines, 12(10), 1153.
https://doi.org/10.3390/mi12101153