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Journal: Micromachines, 2020
Volume: 11
Number: 862
862
Article: Microfabrication Process-Driven Design, FEM Analysis and System Modeling of 3-DoF Drive Mode and 2-DoF Sense Mode Thermally Stable Non-Resonant MEMS Gyroscope
Authors: by Syed Ali Raza Bukhari, Muhammad Mubasher Saleem, Umar Shahbaz Khan, Amir Hamza, Javaid Iqbal and Rana Iqtidar Shakoor
Link: https://www.mdpi.com/2072-666X/11/9/862

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