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Open AccessArticle

3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder

1
Department of Electrical and Computer Engineering, Kansas State University, Manhattan, KS 66506, USA
2
Samil Tech Co., LTD, Bucheon-si 14441, Korea
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(2), 157; https://doi.org/10.3390/mi11020157
Received: 16 December 2019 / Revised: 25 January 2020 / Accepted: 28 January 2020 / Published: 31 January 2020
(This article belongs to the Special Issue Selected Papers from the ICAE 2019)
This paper demonstrates a 3D microlithography system where an array of 5 mm Ultra Violet-Light Emitting Diode (UV-LED) acts as a light source. The unit of the light source is a UV-LED, which comes with a length of about 8.9 mm and a diameter of 5 mm. The whole light source comprises 20 × 20 matrix of such 5 mm UV-LEDs giving a total number of 400 LEDs which makes it a very favorable source with a large area for having a batch production of the desired microstructures. This light source is able to give a level of precision in microfabrication which cannot be obtained using commercial 3D printers. The whole light source performs continuous rotational movement once it is turned on. This can also move up and down in a vertical direction. This multidirectional light source also comprises a multidirectional sample holder. The light source teaming up with the multidirectional sample holder highly facilitates the process of fabrication of a huge range of 3D structures. This article also describes the different levels of characterization of the system and demonstrates several fabricated 3D microstructures including high aspect ratio vertical micro towers, twisted turbine structures, triangles, inclined pillar ‘V’ structures, and hollow horn structures as well. View Full-Text
Keywords: Ultra Violet (UV) lithography; tilt rotational sample holder; SU8 microstructure; high aspect ratio; 3D microstructure Ultra Violet (UV) lithography; tilt rotational sample holder; SU8 microstructure; high aspect ratio; 3D microstructure
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MDPI and ACS Style

Shiba, S.F.; Jeon, H.; Kim, J.-S.; Kim, J.-E.; Kim, J. 3D Microlithography Using an Integrated System of 5-mm UV-LEDs with a Tilt-Rotational Sample Holder. Micromachines 2020, 11, 157.

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