Fabrication of a 3D Multi-Depth Reservoir Micromodel in Borosilicate Glass Using Femtosecond Laser Material Processing
Department of Electrical & Computer Engineering, Schulich School of Engineering, University of Calgary, 2500 University Drive NW, Calgary, AB T2N 1N4, Canada
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Micromachines 2020, 11(12), 1082; https://doi.org/10.3390/mi11121082
Received: 13 November 2020
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Revised: 3 December 2020
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Accepted: 5 December 2020
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Published: 6 December 2020
(This article belongs to the Special Issue New Trends and Applications in Femtosecond Laser Micromachining)
Micromodels are ideal candidates for microfluidic transport investigations, and they have been used for many applications, including oil recovery and carbon dioxide storage. Conventional fabrication methods (e.g., photolithography and chemical etching) are beset with many issues, such as multiple wet processing steps and isotropic etching profiles, making them unsuitable to fabricate complex, multi-depth features. Here, we report a simpler approach, femtosecond laser material processing (FLMP), to fabricate a 3D reservoir micromodel featuring 4 different depths—35, 70, 140, and 280 µm, over a large surface area (20 mm × 15 mm) in a borosilicate glass substrate. The dependence of etch depth on major processing parameters of FLMP, i.e., average laser fluence (
Keywords:
micromodels; porous media; 3D multi-depth channels; laser machining; femtosecond laser micromachining; femtosecond laser material processing; micro/nanotechnology fabrication
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MDPI and ACS Style
Owusu-Ansah, E.; Dalton, C. Fabrication of a 3D Multi-Depth Reservoir Micromodel in Borosilicate Glass Using Femtosecond Laser Material Processing. Micromachines 2020, 11, 1082. https://doi.org/10.3390/mi11121082
AMA Style
Owusu-Ansah E, Dalton C. Fabrication of a 3D Multi-Depth Reservoir Micromodel in Borosilicate Glass Using Femtosecond Laser Material Processing. Micromachines. 2020; 11(12):1082. https://doi.org/10.3390/mi11121082
Chicago/Turabian StyleOwusu-Ansah, Ebenezer, and Colin Dalton. 2020. "Fabrication of a 3D Multi-Depth Reservoir Micromodel in Borosilicate Glass Using Femtosecond Laser Material Processing" Micromachines 11, no. 12: 1082. https://doi.org/10.3390/mi11121082
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