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Journal: Micromachines, 2020
Volume: 11
Number: 1022
Article:
A Resonant Pressure Microsensor with Temperature Compensation Method Based on Differential Outputs and a Temperature Sensor
Authors:
by
Chao Xiang, Yulan Lu, Pengcheng Yan, Jian Chen, Junbo Wang and Deyong Chen
Link:
https://www.mdpi.com/2072-666X/11/11/1022
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