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Journal: Micromachines, 2020
Volume: 11
Number: 95
Article:
A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect
Authors:
by
Xiaoyu Chen, Yuyu Xia, Yifei Mao, Yun Huang, Jia Zhu, Jun Xu, Rui Zhu, Lei Shi and Wengang Wu
Link:
https://www.mdpi.com/2072-666X/11/1/95
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