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Open AccessArticle

A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect

1
National Key Laboratory of Micro/Nano Fabrication Technology, Institue of Microelectronics, Peking University, Beijing 100871, China
2
Department of Physics, Key Laboratory of Micro- and Nano-Photonic Structures (MOE), and State Key Laboratory of Surface Physics, Fudan University, Shanghai 200433, China
3
State Key Lab for Mesoscopic Physics and School of Physics, Peking University, Beijing 100871, China
4
Electron Microscopy Laboratory, Peking University, Beijing 100871, China
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(1), 95; https://doi.org/10.3390/mi11010095
Received: 4 December 2019 / Revised: 9 January 2020 / Accepted: 13 January 2020 / Published: 16 January 2020
(This article belongs to the Section A:Physics)
Due to their unique electromagnetic properties, meta-atom arrays have always been a hotspot to realize all kinds of particular functions, and the research on meta-atom structure has extended from two-dimensions (2D) to three-dimensions (3D) in recent years. With the continuous pursuit of complex 3D meta-atom arrays, the increasing demand for more efficient and more precise nanofabrication methods has encountered challenges. To explore better fabrication methods, we presented a programmable nanofabrication method for a complex 3D meta-atom array based on focused-ion-beam stress-induced deformation (FIB-SID) effect and designed a distinctive nanostructure array composed of periodic 3D meta-atoms to demonstrate the presented method. After successful fabrication of the designed 3D meta-atom arrays, measurements were conducted to investigate the electric/magnetic field properties and infrared spectral characteristics using scanning cathodoluminescence (CL) microscopic imaging and Fourier transform infrared (FTIR) spectroscopy, which revealed a certain excitation mode induced by polarized incident IR light near 8 μm. Besides the programmability for complex 3D meta-atoms and wide applicability of materials, a more significant advantage of the method is that a large-scale array composed of complex 3D meta-atoms can be processed in a quasi-parallel way, which improves the processing efficiency and the consistency of unit cells dramatically. View Full-Text
Keywords: FIB-SID; 3D nanofabrication; 3D meta-atom array; CL imaging; FTIR spectroscopy FIB-SID; 3D nanofabrication; 3D meta-atom array; CL imaging; FTIR spectroscopy
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MDPI and ACS Style

Chen, X.; Xia, Y.; Mao, Y.; Huang, Y.; Zhu, J.; Xu, J.; Zhu, R.; Shi, L.; Wu, W. A Programmable Nanofabrication Method for Complex 3D Meta-Atom Array Based on Focused-Ion-Beam Stress-Induced Deformation Effect. Micromachines 2020, 11, 95.

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