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Open AccessArticle

A Low Contact Impedance Medical Flexible Electrode Based on a Pyramid Array Micro-Structure

1
The State Key Laboratory of Precision Measurement Technology and Instruments, Department of Precision Instrument, Tsinghua University, Beijing 100084, China
2
School of Materials Science and Engineering, University of Science and Technology Beijing, Beijing 100083, China
*
Author to whom correspondence should be addressed.
Micromachines 2020, 11(1), 57; https://doi.org/10.3390/mi11010057
Received: 30 October 2019 / Revised: 25 December 2019 / Accepted: 27 December 2019 / Published: 1 January 2020
(This article belongs to the Special Issue Microelectrode Arrays and Application to Medical Devices)
Flexible electrodes are extensively used to detect signals in electrocardiography, electroencephalography, electro-ophthalmography, and electromyography, among others. These electrodes can also be used in wearable and implantable medical systems. The collected signals directly affect doctors’ diagnoses of patient etiology and are closely associated with patients’ life safety. Electrodes with low contact impedance can acquire good quality signals. Herein, we established a method of arraying pyramidal microstructures on polydimethylsiloxane (PDMS) substrates to increase the contact area of electrodes, and a parylene transitional layer is coated between PDMS substrates and metal membranes to enhance the bonding force, finally reducing the impedance of flexible electrodes. Experimental results demonstrated that the proposed methods were effective. The contact area of the fabricated electrode increased by 18.15% per unit area, and the contact impedance at 20 Hz to 1 kHz scanning frequency ranged from 23 to 8 kΩ, which was always smaller than that of a commercial electrode. Overall, these results indicated the excellent performance of the fabricated electrode given its low contact impedance and good biocompatibility. This study can also serve as a reference for further electrode research and application in wearable and implantable medical systems. View Full-Text
Keywords: flexible electrode; polydimethylsiloxane (PDMS); pyramid array micro-structures; low contact impedance flexible electrode; polydimethylsiloxane (PDMS); pyramid array micro-structures; low contact impedance
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MDPI and ACS Style

Wang, S.; Yan, J.; Zhu, C.; Yao, J.; Liu, Q.; Yang, X. A Low Contact Impedance Medical Flexible Electrode Based on a Pyramid Array Micro-Structure. Micromachines 2020, 11, 57.

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