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Open AccessArticle

A Micromachined Metal Oxide Composite Dual Gas Sensor System for Principal Component Analysis-Based Multi-Monitoring of Noxious Gas Mixtures

1
Department of Chemical Engineering, Kyonggi University, 154-42 Gwanggyosan-ro, Yeongtong-gu, Suwon-si, Gyeonggi-do 16227, Korea
2
Department of Electro-Mechanical Systems Engineering, Korea University, 2511 Sejong-ro, Sejong City 30019, Korea
*
Authors to whom correspondence should be addressed.
Micromachines 2020, 11(1), 24; https://doi.org/10.3390/mi11010024
Received: 24 November 2019 / Revised: 20 December 2019 / Accepted: 21 December 2019 / Published: 24 December 2019
Microelectronic gas-sensor devices were developed for the detection of carbon monoxide (CO), nitrogen dioxides (NO2), ammonia (NH3) and formaldehyde (HCHO), and their gas-sensing characteristics in six different binary gas systems were examined using pattern-recognition methods. Four nanosized gas-sensing materials for these target gases, i.e., Pd-SnO2 for CO, In2O3 for NOX, Ru-WO3 for NH3, and SnO2-ZnO for HCHO, were synthesized using a sol-gel method, and sensor devices were fabricated using a microsensor platform. Principal component analysis of the experimental data from the microelectromechanical systems gas-sensor arrays under exposure to single gases and their mixtures indicated that identification of each individual gas in the mixture was successful. Additionally, the gas-sensing behavior toward the mixed gas indicated that the traditional adsorption and desorption mechanism of the n-type metal oxide semiconductor (MOS) governs the sensing mechanism of the mixed gas systems. View Full-Text
Keywords: dual-sensor system; microelectromechanical systems; metal oxide nanocomposite; noxious gas mixture dual-sensor system; microelectromechanical systems; metal oxide nanocomposite; noxious gas mixture
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MDPI and ACS Style

Yang, I.-H.; Jin, J.-H.; Min, N.K. A Micromachined Metal Oxide Composite Dual Gas Sensor System for Principal Component Analysis-Based Multi-Monitoring of Noxious Gas Mixtures. Micromachines 2020, 11, 24.

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