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Journal: Micromachines, 2020
Volume: 11
Number: 12
Article:
Anti-Symmetric Mode Vibration of Electrostatically Actuated Clamped–Clamped Microbeams for Mass Sensing
Authors:
by
Lei Li, Yin-ping Zhang, Chi-cheng Ma, Can-chang Liu and Bo Peng
Link:
https://www.mdpi.com/2072-666X/11/1/12
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