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Journal: Micromachines, 2019
Volume: 10
Number: 560
Article:
Resonant Pressure Micro Sensors Based on Dual Double Ended Tuning Fork Resonators
Authors:
by
Yulan Lu, Sen Zhang, Pengcheng Yan, Yadong Li, Jie Yu, Deyong Chen, Junbo Wang, Bo Xie and Jian Chen
Link:
https://www.mdpi.com/2072-666X/10/9/560
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