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Journal: MicromachinesVolume: 10Number: 552
Article: A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
  • Authors:
  • Yue Shi1,†,
  • Liang He2,† and
  • Fangcao Guang1
  • et al.
Link: https://www.mdpi.com/2072-666X/10/8/552

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