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Journal: Micromachines, 2019
Volume: 10
Number: 552

Article: A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film
Authors: by Yue Shi, Liang He, Fangcao Guang, Luhai Li, Zhiqing Xin and Ruping Liu
Link: https://www.mdpi.com/2072-666X/10/8/552

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