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Journal: Micromachines, 2019
Volume: 10
Number: 510
510
Article: Fabrication of Micro- and Nanopillars from Pyrolytic Carbon and Tetrahedral Amorphous Carbon
Authors: by Joonas J. Heikkinen, Emilia Peltola, Niklas Wester, Jari Koskinen, Tomi Laurila, Sami Franssila and Ville Jokinen
Link: https://www.mdpi.com/2072-666X/10/8/510

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