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Open AccessArticle

KLu(WO4)2/SiO2 Tapered Waveguide Platform for Sensing Applications

1
Física i Cristallografia de Materials i Nanomaterials (FiCMA-FiCNA-EMaS), Departament de Química Física i Inorganica (DQFI), Universitat Rovira i Virgili (URV), Campus Sescelades, C/Marcellí Domingo 1, E-43007 Tarragona, Spain
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Faculty of Electrical Engineering, Helmut Schmidt University, 22043 Hamburg, Germany
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Departamento de Física, Instituto de Estudios Avanzados (IUdEA), Universidad de la Laguna (ULL), E-38200 San Cristóbal de La Laguna, Spain
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(7), 454; https://doi.org/10.3390/mi10070454
Received: 21 May 2019 / Revised: 1 July 2019 / Accepted: 2 July 2019 / Published: 5 July 2019
(This article belongs to the Section D:Materials and Processing)
This paper provides a generic way to fabricate a high-index contrast tapered waveguide platform based on dielectric crystal bonded on glass for sensing applications. As a specific example, KLu(WO4)2 crystal on a glass platform is made by means of a three-technique combination. The methodology used is on-chip bonding, taper cutting with an ultra-precise dicing saw machine and inductively coupled plasma-reactive ion etching (ICP-RIE) as a post-processing step. The high quality tapered waveguides obtained show low surface roughness (25 nm at the top of the taper region), exhibiting propagation losses estimated to be about 3 dB/cm at 3.5 μm wavelength. A proof-of-concept with crystal-on-glass tapered waveguides was realized and used for chemical sensing. View Full-Text
Keywords: tapered waveguides; ultraprecise dicing saw; biochemical sensors; label-free tapered waveguides; ultraprecise dicing saw; biochemical sensors; label-free
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MDPI and ACS Style

Medina, M.; Rüter, C.E.; Pujol, M.C.; Kip, D.; Masons, J.; Ródenas, A.; Aguiló, M.; Díaz, F. KLu(WO4)2/SiO2 Tapered Waveguide Platform for Sensing Applications. Micromachines 2019, 10, 454. https://doi.org/10.3390/mi10070454

AMA Style

Medina M, Rüter CE, Pujol MC, Kip D, Masons J, Ródenas A, Aguiló M, Díaz F. KLu(WO4)2/SiO2 Tapered Waveguide Platform for Sensing Applications. Micromachines. 2019; 10(7):454. https://doi.org/10.3390/mi10070454

Chicago/Turabian Style

Medina, Marc; Rüter, Christian E.; Pujol, Maria C.; Kip, Detlef; Masons, Jaume; Ródenas, Airán; Aguiló, Magdalena; Díaz, Francisco. 2019. "KLu(WO4)2/SiO2 Tapered Waveguide Platform for Sensing Applications" Micromachines 10, no. 7: 454. https://doi.org/10.3390/mi10070454

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