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Incorporation of Phosphorus Impurities in a Silicon Nanowire Transistor with a Diameter of 5 nm
 
 

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Journal: Micromachines, 2019
Volume: 10
Number: 300

Article: Editorial for the Special Issue on Miniaturized Transistors
Authors: by Lado Filipovic and Tibor Grasser
Link: https://www.mdpi.com/2072-666X/10/5/300

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