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Journal: MicromachinesVolume: 10Number: 258
Article: Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance
- Authors:
- Jeffrey McAllister1,*,
- Calliandra Stuffle1 and
- Yasa Sampurno1,2
- et al.
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