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Journal: Micromachines, 2019
Volume: 10
Number: 258
258
Article: Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO₂ Chemical Mechanical Planarization Performance
Authors: by Jeffrey McAllister, Calliandra Stuffle, Yasa Sampurno, Dale Hetherington, Jon Sierra Suarez, Leonard Borucki and Ara Philipossian
Link: https://www.mdpi.com/2072-666X/10/4/258

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