McAllister, J.; Stuffle, C.; Sampurno, Y.; Hetherington, D.; Sierra Suarez, J.; Borucki, L.; Philipossian, A.
Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance. Micromachines 2019, 10, 258.
https://doi.org/10.3390/mi10040258
AMA Style
McAllister J, Stuffle C, Sampurno Y, Hetherington D, Sierra Suarez J, Borucki L, Philipossian A.
Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance. Micromachines. 2019; 10(4):258.
https://doi.org/10.3390/mi10040258
Chicago/Turabian Style
McAllister, Jeffrey, Calliandra Stuffle, Yasa Sampurno, Dale Hetherington, Jon Sierra Suarez, Leonard Borucki, and Ara Philipossian.
2019. "Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance" Micromachines 10, no. 4: 258.
https://doi.org/10.3390/mi10040258
APA Style
McAllister, J., Stuffle, C., Sampurno, Y., Hetherington, D., Sierra Suarez, J., Borucki, L., & Philipossian, A.
(2019). Effect of Conditioner Type and Downforce, and Pad Surface Micro-Texture on SiO2 Chemical Mechanical Planarization Performance. Micromachines, 10(4), 258.
https://doi.org/10.3390/mi10040258