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Journal: Micromachines, 2019
Volume: 10
Number: 202
202
Article: The Influence of AlN Intermediate Layer on the Structural and Chemical Properties of SiC Thin Films Produced by High-Power Impulse Magnetron Sputtering
Authors: by Nierlly Galvão, Marciel Guerino, Tiago Campos, Korneli Grigorov, Mariana Fraga, Bruno Rodrigues, Rodrigo Pessoa, Julien Camus, Mohammed Djouadi and Homero Maciel
Link: https://www.mdpi.com/2072-666X/10/3/202

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