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Micromachines 2019, 10(2), 112;

Development of a High Flow Rate 3-D Electroosmotic Flow Pump

Key Laboratory of Cryogenics, Technical Institute of Physics and Chemistry, Chinese Academy of Sciences, 29 Zhongguancun East Road, Haidu District, Beijing 10019, China
School of Future Technology, University of Chinese Academy of Sciences, 19 Yuquan road, Shijingshan District, Beijing 100039, China
Author to whom correspondence should be addressed.
Received: 26 December 2018 / Revised: 23 January 2019 / Accepted: 2 February 2019 / Published: 11 February 2019
(This article belongs to the Special Issue Micro/Nano-Chip Electrokinetics, Volume III)
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A low voltage 3D parallel electroosmotic flow (EOF) pump composed of two electrode layers and a fluid layer is proposed in this work. The fluid layer contains twenty parallel fluid channels and is set at the middle of the two electrode layers. The distance between fluid and electrode channels was controlled to be under 45 μm, to reduce the driving voltage. Room temperature liquid metal was directly injected into the electrode channels by syringe to form non-contact electrodes. Deionized (DI) water with fluorescent particles was used to test the pumping performance of this EOF pump. According to the experimental results, a flow rate of 5.69 nL/min was reached at a driving voltage of 2 V. The size of this pump is small, and it shows a great potential for implanted applications. This structure could be easily expanded for more parallel fluid channels and larger flow rate. View Full-Text
Keywords: multi-layer structure; electroosmotic flow (EOF) pump; parallel fluid channels; liquid metal electrodes multi-layer structure; electroosmotic flow (EOF) pump; parallel fluid channels; liquid metal electrodes

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Ye, Z.; Zhang, R.; Gao, M.; Deng, Z.; Gui, L. Development of a High Flow Rate 3-D Electroosmotic Flow Pump. Micromachines 2019, 10, 112.

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