Next Article in Journal
Prediction of Droplet Production Speed by Measuring the Droplet Spacing Fluctuations in a Flow-Focusing Microdroplet Generator
Next Article in Special Issue
Study on the Critical Wind Speed of a Resonant Cavity Piezoelectric Energy Harvester Driven by Driving Wind Pressure
Previous Article in Journal
A Micropatterning Strategy to Study Nuclear Mechanotransduction in Cells
Previous Article in Special Issue
Physical Characteristics of and Transient Response from Thin Cylindrical Piezoelectric Transducers Used in a Petroleum Logging Tool
Open AccessArticle

Visual Servo Control System of a Piezoelectric2-Degree-of-Freedom Nano-Stepping Motor

Department of Mechanical Engineering, National Chiao Tung University, No. 1001, University Road, Hsinchu 30010, Taiwan
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(12), 811; https://doi.org/10.3390/mi10120811
Received: 9 October 2019 / Revised: 22 November 2019 / Accepted: 22 November 2019 / Published: 25 November 2019
(This article belongs to the Special Issue Piezoelectric Transducers: Materials, Devices and Applications)
A nano-stepping motor can translate or rotate when its piezoelectric element pair is electrically driven in-phase or anti-phase. It offers millimeter-level stroke, sub-micron-level stepping size, and sub-nanometer-level scanning resolution. This article proposes a visual servo system to control the nano-stepping motor, since its stepping size is not consistent due to changing contact friction, using a custom built microscopic instrument and image recognition software. Three kinds of trajectories—straight lines, circles, and pentagrams—are performed successfully. The smallest straightness and roundness ever tested are 0.291 µm and 2.380 µm. Experimental results show that the proposed controller can effectively compensate for the error and precisely navigate the rotor along a desired trajectory. View Full-Text
Keywords: piezoelectricity; visual servo control; stepping motor; nano-positioner; stick-slip piezoelectricity; visual servo control; stepping motor; nano-positioner; stick-slip
Show Figures

Figure 1

MDPI and ACS Style

Chen, C.-L.; Hung, S.-K. Visual Servo Control System of a Piezoelectric2-Degree-of-Freedom Nano-Stepping Motor. Micromachines 2019, 10, 811.

Show more citation formats Show less citations formats
Note that from the first issue of 2016, MDPI journals use article numbers instead of page numbers. See further details here.

Article Access Map by Country/Region

1
Back to TopTop