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Open AccessArticle

Influence of Waterproof Films on the Atomization Behavior of Surface Acoustic Waves

School of Mechanical Engineering and Automation, Harbin Institute of Technology, Shenzhen, Guangdong 518055, China
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Micromachines 2019, 10(11), 794; https://doi.org/10.3390/mi10110794
Received: 25 October 2019 / Revised: 15 November 2019 / Accepted: 18 November 2019 / Published: 19 November 2019
One of the reasons why commercial application of surface acoustic wave (SAW) atomization is not possible is due to the condensation of aerosol droplets generated during atomization, which drip on the interdigitated transducer (IDT), thereby causing electrodes to short-circuit. In order to solve this problem, a SU-8-2002 film coating on an IDT is proposed in this paper. The waterproof performance of the film coating was tested on a surface acoustic wave (SAW) device several times. The experimental results reveal that the film coating was robust. The experiment also investigated the effects of the SU-8-2002 film on atomization behavior and heating. View Full-Text
Keywords: surface acoustic wave (SAW); film coating; atomization behavior surface acoustic wave (SAW); film coating; atomization behavior
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MDPI and ACS Style

Huang, Q.-Y.; Hu, H.; Han, J.-L.; Lei, Y.-L.; Yang, X.-Q. Influence of Waterproof Films on the Atomization Behavior of Surface Acoustic Waves. Micromachines 2019, 10, 794.

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