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Open AccessArticle

Nanometer Gap in Electromechanical Converters—A Way to Achieve an Extremely High Energy Density

Institute of Automation and Electrometry, Siberian Branch, Russian Academy of Sciences, 630090 Novosibirsk, Russia
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Micromachines 2019, 10(11), 746; https://doi.org/10.3390/mi10110746
Received: 2 October 2019 / Revised: 29 October 2019 / Accepted: 30 October 2019 / Published: 31 October 2019
The analysis of electromechanical energy converters based on metal-thin film ferroelectric (with a large specific capacitance)-nanogap-moving electrode structures was performed. It was shown that the density of the energy being converted and its absolute value increase with the decreasing gap value between the surfaces of the ferroelectric and the metallic moving electrode up to nanometer values. The effects limiting the growth of this energy were established, and the limiting value of the energy density transformed in the nanogap of these structures was determined to be about 1.6 × 1010 J/m3, which is 4 orders of magnitude higher than the energy density in inductive converters. The experimental verification of this model based on the data for micromotors fabricated on these structures is given. View Full-Text
Keywords: energy converter; electrostatics; nanogap; ferroelectric; limiting energy density energy converter; electrostatics; nanogap; ferroelectric; limiting energy density
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MDPI and ACS Style

Baginsky, I.L.; Kostsov, E.G. Nanometer Gap in Electromechanical Converters—A Way to Achieve an Extremely High Energy Density. Micromachines 2019, 10, 746.

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