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Open AccessArticle

Stretchable Piezoelectric Power Generators Based on ZnO Thin Films on Elastic Substrates

1
Mechanical Engineering Department, City College of New York, New York, NY 10031, USA
2
Mechanical Engineering Department, New York Institute of Technology, New York, NY 11568, USA
3
Chemistry and Biochemistry Department, City College of New York, New York, NY 10031, USA
4
Mechanical Engineering Department, University of Montpellier, 34095 Montpellier, France
*
Author to whom correspondence should be addressed.
Micromachines 2019, 10(10), 661; https://doi.org/10.3390/mi10100661
Received: 3 September 2019 / Revised: 29 September 2019 / Accepted: 29 September 2019 / Published: 30 September 2019
(This article belongs to the Section D:Materials and Processing)
The paper describes a stretchable, microfabricated power generator that will be attached on the skin and will produce energy based on the movements of the human body. The device was fabricated on a polymeric, elastomeric, poly(dimethylsiloxane) (PDMS) sheet. It consists of a piezoelectric thin film of ZnO sandwiched between two stretchable gold electrodes. An innovative technique was used for the deposition of ZnO thin film on the gold electrode-coated polymeric substrate at low temperatures below 150 °C. This is the first attempt to use a uniform film of ZnO, for energy harvesting. The ZnO film had the thickness at the submicron scale and the surface at the centimeter scale. We demonstrated that under a strain of 8% the voltage output from this power generator was equal to 2 V, the power output was equal to 160 μW and the corresponding power density was 1.27 mW/cm2. This device has great potential for application in power sensors attached on the human body, such as temperature sensors or wearable electrocardiography systems. View Full-Text
Keywords: ZnO nanofilm; piezoelectric energy harvesting; stretchable power generator; wearable power generator ZnO nanofilm; piezoelectric energy harvesting; stretchable power generator; wearable power generator
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MDPI and ACS Style

Voiculescu, I.; Li, F.; Kowach, G.; Lee, K.-L.; Mistou, N.; Kastberg, R. Stretchable Piezoelectric Power Generators Based on ZnO Thin Films on Elastic Substrates. Micromachines 2019, 10, 661.

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