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Journal: Micromachines, 2019
Volume: 10
Number: 47
Article:
Hybrid 3D Shape Measurement Using the MEMS Scanning Micromirror
Authors:
by
Tao Yang, Guanliang Zhang, Huanhuan Li and Xiang Zhou
Link:
https://www.mdpi.com/2072-666X/10/1/47
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