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Journal: Micromachines, 2010
Volume: 1
Number: 48
48-67
Article: High-Performance Shuffle Motor Fabricated by Vertical Trench Isolation Technology
Authors: by Edin Sarajlic, Christophe Yamahata, Erwin Berenschot, Niels Tas, Hiroyuki Fujita and Gijs Krijnen
Link: https://www.mdpi.com/2072-666X/1/2/48

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