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Journal: Materials, 2016
Volume: 9
Number: 686

Article: Effects of Sputtering Parameters on AlN Film Growth on Flexible Hastelloy Tapes by Two-Step Deposition Technique
Authors: by Bin Peng, Dongdong Gong, Wanli Zhang, Jianying Jiang, Lin Shu and Yahui Zhang
Link: https://www.mdpi.com/1996-1944/9/8/686

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