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Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices

1
SAWLab Saxony, IFW Dresden, 270116 01171 Dresden, Germany
2
Erich Schmid Institute of Materials Science, Austrian Academy of Sciences (ÖAW), Austria
3
Department Materials Physics, Montanuniversität Leoben, 12 A-8700 Leoben, Austria
*
Author to whom correspondence should be addressed.
Materials 2016, 9(2), 101; https://doi.org/10.3390/ma9020101
Received: 5 January 2016 / Accepted: 4 February 2016 / Published: 6 February 2016
(This article belongs to the Section Advanced Composites)
Thin films of tungsten on piezoelectric substrates La3Ga5SiO14 (LGS) and Ca3TaGa3Si2O14 (CTGS) have been investigated as a potential new electrode material for interdigital transducers for surface acoustic wave-based sensor devices operating at high temperatures up to 800 °C under vacuum conditions. Although LGS is considered to be suitable for high-temperature applications, it undergoes chemical and structural transformation upon vacuum annealing due to diffusion of gallium and oxygen. This can alter the device properties depending on the electrode nature, the annealing temperature, and the duration of the application. Our studies present evidence for the chemical stability of W on these substrates against the diffusion of Ga/O from the substrate into the film, even upon annealing up to 800 °C under vacuum conditions using Auger electron spectroscopy and energy-dispersive X-ray spectroscopy, along with local studies using transmission electron microscopy. Additionally, the use of CTGS as a more stable substrate for such applications is indicated. View Full-Text
Keywords: high temperature sensor; surface acoustic wave devices; electrode material; refractory metal thin film high temperature sensor; surface acoustic wave devices; electrode material; refractory metal thin film
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MDPI and ACS Style

Rane, G.K.; Seifert, M.; Menzel, S.; Gemming, T.; Eckert, J. Tungsten as a Chemically-Stable Electrode Material on Ga-Containing Piezoelectric Substrates Langasite and Catangasite for High-Temperature SAW Devices. Materials 2016, 9, 101.

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