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Journal: Materials, 2024
Volume: 17
Number: 1135

Article: Amorphous SiC Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition for Passivation in Biomedical Devices
Authors: by Scott Greenhorn, Edwige Bano, Valérie Stambouli and Konstantinos Zekentes
Link: https://www.mdpi.com/1996-1944/17/5/1135

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