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Journal: Materials, 2022
Volume: 15
Number: 3115

Article: Argon Ion Beam Current Dependence of Si-Si Surface Activated Bonding
Authors: by Song Yang, Ningkang Deng, Yongfeng Qu, Kang Wang, Yuan Yuan, Wenbo Hu, Shengli Wu and Hongxing Wang
Link: https://www.mdpi.com/1996-1944/15/9/3115

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