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Journal: Materials, 2022
Volume: 15
Number: 2090

Article: Electrical Properties of Aluminum Nitride Thick Films Magnetron Sputtered on Aluminum Substrates
Authors: by Daniele Desideri, Enrico Bernardo, Alain Jody Corso, Federico Moro and Maria Guglielmina Pelizzo
Link: https://www.mdpi.com/1996-1944/15/6/2090

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