Seweryn, A.; Lawniczak-Jablonska, K.; Kuzmiuk, P.; Gieraltowska, S.; Godlewski, M.; Mroczynski, R.
Investigations of Structural and Electrical Properties of ALD Films Formed with the Ozone Precursor. Materials 2021, 14, 5395.
https://doi.org/10.3390/ma14185395
AMA Style
Seweryn A, Lawniczak-Jablonska K, Kuzmiuk P, Gieraltowska S, Godlewski M, Mroczynski R.
Investigations of Structural and Electrical Properties of ALD Films Formed with the Ozone Precursor. Materials. 2021; 14(18):5395.
https://doi.org/10.3390/ma14185395
Chicago/Turabian Style
Seweryn, Aleksandra, Krystyna Lawniczak-Jablonska, Piotr Kuzmiuk, Sylwia Gieraltowska, Marek Godlewski, and Robert Mroczynski.
2021. "Investigations of Structural and Electrical Properties of ALD Films Formed with the Ozone Precursor" Materials 14, no. 18: 5395.
https://doi.org/10.3390/ma14185395
APA Style
Seweryn, A., Lawniczak-Jablonska, K., Kuzmiuk, P., Gieraltowska, S., Godlewski, M., & Mroczynski, R.
(2021). Investigations of Structural and Electrical Properties of ALD Films Formed with the Ozone Precursor. Materials, 14(18), 5395.
https://doi.org/10.3390/ma14185395