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Journal: Materials, 2021
Volume: 14
Number: 3328
Article:
Extensive Analysis on the Effects of Post-Deposition Annealing for ALD-Deposited Al2O3 on an n-Type Silicon Substrate
Authors:
by
Atish Bhattacharjee and Tae-Woo Kim
Link:
https://www.mdpi.com/1996-1944/14/12/3328
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