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Journal: Materials, 2020
Volume: 13
Number: 2147
2147
Article: PECVD of Hexamethyldisiloxane Coatings Using Extremely Asymmetric Capacitive RF Discharge
Authors: by Žiga Gosar, Janez Kovač, Denis Đonlagić, Simon Pevec, Gregor Primc, Ita Junkar, Alenka Vesel and Rok Zaplotnik
Link: https://www.mdpi.com/1996-1944/13/9/2147

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