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Mechanical-Resonance-Enhanced Thin-Film Magnetoelectric Heterostructures for Magnetometers, Mechanical Antennas, Tunable RF Inductors, and Filters

1
Department of Electrical and Computer Engineering, Northeastern University, Boston, MA 02115, USA
2
College of Engineering, Peking University, Beijing 100871, China
3
Institute for Materials Science, Kiel University, Kaiserstraße 2, 24143 Kiel, Germany
4
Winchester Technologies LLC, Burlington, MA 01803, USA
5
Materials Science and Engineering, Tsinghua University, Beijing 100084, China
*
Authors to whom correspondence should be addressed.
Materials 2019, 12(14), 2259; https://doi.org/10.3390/ma12142259
Received: 16 June 2019 / Revised: 9 July 2019 / Accepted: 11 July 2019 / Published: 13 July 2019
(This article belongs to the Special Issue Advances in Multiferroics)
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Abstract

The strong strain-mediated magnetoelectric (ME) coupling found in thin-film ME heterostructures has attracted an ever-increasing interest and enables realization of a great number of integrated multiferroic devices, such as magnetometers, mechanical antennas, RF tunable inductors and filters. This paper first reviews the thin-film characterization techniques for both piezoelectric and magnetostrictive thin films, which are crucial in determining the strength of the ME coupling. After that, the most recent progress on various integrated multiferroic devices based on thin-film ME heterostructures are presented. In particular, rapid development of thin-film ME magnetometers has been seen over the past few years. These ultra-sensitive magnetometers exhibit extremely low limit of detection (sub-pT/Hz1/2) for low-frequency AC magnetic fields, making them potential candidates for applications of medical diagnostics. Other devices reviewed in this paper include acoustically actuated nanomechanical ME antennas with miniaturized size by 1–2 orders compared to the conventional antenna; integrated RF tunable inductors with a wide operation frequency range; integrated RF tunable bandpass filter with dual H- and E-field tunability. All these integrated multiferroic devices are compact, lightweight, power-efficient, and potentially integrable with current complementary metal oxide semiconductor (CMOS) technology, showing great promise for applications in future biomedical, wireless communication, and reconfigurable electronic systems. View Full-Text
Keywords: thin film; magnetoelectric (ME) heterostructures; multiferroic devices; magnetometers; mechanical antennas; tunable RF devices thin film; magnetoelectric (ME) heterostructures; multiferroic devices; magnetometers; mechanical antennas; tunable RF devices
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Tu, C.; Chu, Z.-Q.; Spetzler, B.; Hayes, P.; Dong, C.-Z.; Liang, X.-F.; Chen, H.-H.; He, Y.-F.; Wei, Y.-Y.; Lisenkov, I.; Lin, H.; Lin, Y.-H.; McCord, J.; Faupel, F.; Quandt, E.; Sun, N.-X. Mechanical-Resonance-Enhanced Thin-Film Magnetoelectric Heterostructures for Magnetometers, Mechanical Antennas, Tunable RF Inductors, and Filters. Materials 2019, 12, 2259.

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