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Design and Manufacturing Method of Fundamental Beam Mode Shaper for Adapted Laser Beam Profile in Laser Material Processing

1
Topag Lasertechnik GmbH, Nieder-Ramstädter-Str. 247, 64285 Darmstadt, Germany
2
Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany
3
Institut für Mikrotechnologien, Hochschule RheinMain, Am Brückweg 26, 65428 Rüsselsheim, Germany
4
Fraunhofer-Institut für Werkstoff-und Strahltechnik IWS, Winterbergstr. 28, 01277 Dresden, Germany
*
Author to whom correspondence should be addressed.
Materials 2019, 12(14), 2254; https://doi.org/10.3390/ma12142254
Received: 13 June 2019 / Revised: 7 July 2019 / Accepted: 9 July 2019 / Published: 13 July 2019
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Abstract

Many laser material processing applications require an optimized beam profile, e.g., ring shape or Top-Hat profiles with homogeneous intensity distribution. In this study, we show a beam shaping concept leading to a phase shifting element with binary height profile as well as a very low periodicity with near diffraction limited spot size. Further advantages of so-called Fundamental Beam Mode Shaping (FBS) elements are the simplified handling, and a high efficiency and homogeneity. The calculated height profile of FBS elements are transferred in fused silica substrates using a combination of microlithography technologies, reactive ion etching (RIE) and ion beam etching (IBE). The experiments demonstrated a linear relation between the etching depth after RIE and IBE. The optical evaluation of the manufactured FBS beam mode shaper confirmed the presented concept design. View Full-Text
Keywords: phase shifting element; micro technology; laser processing; beam shaping phase shifting element; micro technology; laser processing; beam shaping
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Bischoff, C.; Völklein, F.; Schmitt, J.; Rädel, U.; Umhofer, U.; Jäger, E.; Lasagni, A.F. Design and Manufacturing Method of Fundamental Beam Mode Shaper for Adapted Laser Beam Profile in Laser Material Processing. Materials 2019, 12, 2254.

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