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Design and Manufacturing Method of Fundamental Beam Mode Shaper for Adapted Laser Beam Profile in Laser Material Processing

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Topag Lasertechnik GmbH, Nieder-Ramstädter-Str. 247, 64285 Darmstadt, Germany
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Institut für Fertigungstechnik, Technische Universität Dresden, George-Bähr-Str. 3c, 01069 Dresden, Germany
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Institut für Mikrotechnologien, Hochschule RheinMain, Am Brückweg 26, 65428 Rüsselsheim, Germany
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Fraunhofer-Institut für Werkstoff-und Strahltechnik IWS, Winterbergstr. 28, 01277 Dresden, Germany
*
Author to whom correspondence should be addressed.
Materials 2019, 12(14), 2254; https://doi.org/10.3390/ma12142254
Received: 13 June 2019 / Revised: 7 July 2019 / Accepted: 9 July 2019 / Published: 13 July 2019
Many laser material processing applications require an optimized beam profile, e.g., ring shape or Top-Hat profiles with homogeneous intensity distribution. In this study, we show a beam shaping concept leading to a phase shifting element with binary height profile as well as a very low periodicity with near diffraction limited spot size. Further advantages of so-called Fundamental Beam Mode Shaping (FBS) elements are the simplified handling, and a high efficiency and homogeneity. The calculated height profile of FBS elements are transferred in fused silica substrates using a combination of microlithography technologies, reactive ion etching (RIE) and ion beam etching (IBE). The experiments demonstrated a linear relation between the etching depth after RIE and IBE. The optical evaluation of the manufactured FBS beam mode shaper confirmed the presented concept design. View Full-Text
Keywords: phase shifting element; micro technology; laser processing; beam shaping phase shifting element; micro technology; laser processing; beam shaping
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MDPI and ACS Style

Bischoff, C.; Völklein, F.; Schmitt, J.; Rädel, U.; Umhofer, U.; Jäger, E.; Lasagni, A.F. Design and Manufacturing Method of Fundamental Beam Mode Shaper for Adapted Laser Beam Profile in Laser Material Processing. Materials 2019, 12, 2254.

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1
Materials, EISSN 1996-1944, Published by MDPI AG
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