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Journal: Materials, 2018
Volume: 11
Number: 386
386
Article: Effect of Growth Temperature on the Structural and Electrical Properties of ZrO₂ Films Fabricated by Atomic Layer Deposition Using a CpZr[N(CH₃)₂]₃/C₇H₈ Cocktail Precursor
Authors: by Jong-Ki An, Nak-Kwan Chung, Jin-Tae Kim, Sung-Ho Hahm, Geunsu Lee, Sung Bo Lee, Taehoon Lee, In-Sung Park and Ju-Young Yun
Link: https://www.mdpi.com/1996-1944/11/3/386

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