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Materials 2018, 11(11), 2221; https://doi.org/10.3390/ma11112221

Indium-Zinc-Tin-Oxide Film Prepared by Reactive Magnetron Sputtering for Electrochromic Applications

1
Department of Materials Science and Engineering, National Cheng Kung University, Tainan 70101, Taiwan
2
Division of Physics, Institute of Nuclear Energy Research, Taoyuan County 32546, Taiwan
*
Author to whom correspondence should be addressed.
Received: 3 October 2018 / Revised: 2 November 2018 / Accepted: 2 November 2018 / Published: 8 November 2018
(This article belongs to the Special Issue Transparent Conductive Films and Their Applications)
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Abstract

This paper reports on the fabrication of indium-zinc-tin-oxide (IZTO) transparent conductive film deposited by direct current (DC) reactive magnetron sputtering. The electrical, structural, and optical properties of IZTO film were investigated by Hall measurement, X-ray diffraction (XRD), and optical transmission spectroscopy with various sputtering powers. The IZTO film prepared used power at 100 W showed the lowest resistivity of 5.2 × 10−4 Ω cm. To accomplish rapid switching and high optical modulation, we have fabricated an electrochromic device (ECD) consisting of an working electrode (WO3 electrode film deposited on IZTO/ITO/glass) and a counter-electrode (Pt mesh) in 0.2 M LiClO4/PC liquid solution. The device demonstrated an optical contrast of 44% and switching times of 4.6 s and 8.1 s for the coloring and bleaching state, respectively, at the wavelength of 550 nm. View Full-Text
Keywords: indium-zinc-tin-oxide (IZTO) film; electrochromic device (ECD); tungsten electrode film; DC reactive magnetron sputtering; cathodic arc plasma (CAP) indium-zinc-tin-oxide (IZTO) film; electrochromic device (ECD); tungsten electrode film; DC reactive magnetron sputtering; cathodic arc plasma (CAP)
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This is an open access article distributed under the Creative Commons Attribution License which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited (CC BY 4.0).
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Li, K.-D.; Chen, P.-W.; Chang, K.-S.; Hsu, S.-C.; Jan, D.-J. Indium-Zinc-Tin-Oxide Film Prepared by Reactive Magnetron Sputtering for Electrochromic Applications. Materials 2018, 11, 2221.

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