Wang, T.; Peng, H.; Cao, P.; Zhuang, Q.; Deng, J.; Chen, J.; Zheng, W.
Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with Improved Fabrication Process. Sensors 2024, 24, 640.
https://doi.org/10.3390/s24020640
AMA Style
Wang T, Peng H, Cao P, Zhuang Q, Deng J, Chen J, Zheng W.
Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with Improved Fabrication Process. Sensors. 2024; 24(2):640.
https://doi.org/10.3390/s24020640
Chicago/Turabian Style
Wang, Tiancai, Hongling Peng, Peng Cao, Qiandong Zhuang, Jie Deng, Jian Chen, and Wanhua Zheng.
2024. "Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with Improved Fabrication Process" Sensors 24, no. 2: 640.
https://doi.org/10.3390/s24020640
APA Style
Wang, T., Peng, H., Cao, P., Zhuang, Q., Deng, J., Chen, J., & Zheng, W.
(2024). Low-Energy Ion Implantation and Deep-Mesa Si-Avalanche Photodiodes with Improved Fabrication Process. Sensors, 24(2), 640.
https://doi.org/10.3390/s24020640