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Journal: Sensors, 2023
Volume: 23
Number: 5394

Article: Multiple-Degree-of-Freedom Modeling and Simulation for Seismic-Grade Sigma–Delta MEMS Capacitive Accelerometers
Authors: by Xuefeng Wang, Penghao Zhang and Shijin Ding
Link: https://www.mdpi.com/1424-8220/23/12/5394

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