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Journal: Sensors, 2022
Volume: 22
Number: 7751
Article:
Quality Factor Enhancement of Piezoelectric MEMS Resonator Using a Small Cross-Section Connection Phononic Crystal
Authors:
by
Lixia Li, Chuang Zhu, Haixia Liu, Yan Li, Qi Wang and Kun Su
Link:
https://www.mdpi.com/1424-8220/22/20/7751
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