de La Rochefoucauld, O.; Dovillaire, G.; Harms, F.; Idir, M.; Huang, L.; Levecq, X.; Piponnier, M.; Zeitoun, P.
EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors 2021, 21, 874.
https://doi.org/10.3390/s21030874
AMA Style
de La Rochefoucauld O, Dovillaire G, Harms F, Idir M, Huang L, Levecq X, Piponnier M, Zeitoun P.
EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors. 2021; 21(3):874.
https://doi.org/10.3390/s21030874
Chicago/Turabian Style
de La Rochefoucauld, Ombeline, Guillaume Dovillaire, Fabrice Harms, Mourad Idir, Lei Huang, Xavier Levecq, Martin Piponnier, and Philippe Zeitoun.
2021. "EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging" Sensors 21, no. 3: 874.
https://doi.org/10.3390/s21030874
APA Style
de La Rochefoucauld, O., Dovillaire, G., Harms, F., Idir, M., Huang, L., Levecq, X., Piponnier, M., & Zeitoun, P.
(2021). EUV and Hard X-ray Hartmann Wavefront Sensing for Optical Metrology, Alignment and Phase Imaging. Sensors, 21(3), 874.
https://doi.org/10.3390/s21030874
