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Journal: Sensors, 2021
Volume: 21
Number: 5153
Article:
Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays
Authors:
by
Marcel Tintelott, Vivek Pachauri, Sven Ingebrandt and Xuan Thang Vu
Link:
https://www.mdpi.com/1424-8220/21/15/5153
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