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Journal: Sensors, 2021
Volume: 21
Number: 5153

Article: Process Variability in Top-Down Fabrication of Silicon Nanowire-Based Biosensor Arrays
Authors: by Marcel Tintelott, Vivek Pachauri, Sven Ingebrandt and Xuan Thang Vu
Link: https://www.mdpi.com/1424-8220/21/15/5153

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