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Journal: Sensors, 2021
Volume: 21
Number: 4337
Article:
Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor
Authors:
by
Wenhan Chang, Lingmeng Yang, Zhezheng Zhu, Zhenchuan Yang, Yilong Hao and Chengchen Gao
Link:
https://www.mdpi.com/1424-8220/21/13/4337
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