Chang, W.; Yang, L.; Zhu, Z.; Yang, Z.; Hao, Y.; Gao, C.
Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor. Sensors 2021, 21, 4337.
https://doi.org/10.3390/s21134337
AMA Style
Chang W, Yang L, Zhu Z, Yang Z, Hao Y, Gao C.
Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor. Sensors. 2021; 21(13):4337.
https://doi.org/10.3390/s21134337
Chicago/Turabian Style
Chang, Wenhan, Lingmeng Yang, Zhezheng Zhu, Zhenchuan Yang, Yilong Hao, and Chengchen Gao.
2021. "Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor" Sensors 21, no. 13: 4337.
https://doi.org/10.3390/s21134337
APA Style
Chang, W., Yang, L., Zhu, Z., Yang, Z., Hao, Y., & Gao, C.
(2021). Design and Optimization of Sensitivity Enhancement Package for MEMS-Based Thermal Acoustic Particle Velocity Sensor. Sensors, 21(13), 4337.
https://doi.org/10.3390/s21134337